Q49: What should you do if the MFC has no flow or insufficient flow?
A: First, check the gas source, pressure-reducing valve, and filter. Then, inspect the valve orifice for blockage, and verify the working pressure differential, setpoint, and communication. Also, check whether the downstream valve is closed.
Q50: What should you do if the flow fluctuates greatly?
A: Check whether the inlet pressure is stable and the pressure differential is sufficient. In addition, verify that the PID parameters are appropriate, the gas source is not pulsating, and there is no electromagnetic interference.
Q51: What should you do if the MFC cannot fully shut off?
A: This may result from valve orifice contamination, leakage of a normally closed valve, a minimum controllable flow limit, or excessive pressure differential. Therefore, you can purge, calibrate, or return it to the factory for repair.
Q52: What should you do if the display is abnormal?
A: Check the power supply, grounding, signal cable, communication configuration, and sensor zero point. If necessary, return the device to the factory for inspection.
Q53: What should you do if communication fails?
A: Check the address, baud rate, wiring, terminal resistor, shielding, power supply, and protocol settings. Moreover, verify each item carefully.
Q54: What should you do if you find a leak?
A: Check the connectors, O-rings, VCR gaskets, valves, and pipelines. For high-purity systems, we recommend performing helium leak detection.
Q55: What should you do if the zero point drifts?
A: Warm up the MFC sufficiently, and then zero it with no flow. Also, check for temperature changes, contamination, and sensor aging.
Q56: What should you do if the flow overshoots?
A: Adjust the PID parameters and reduce the gain. In addition, check the pressure differential and valve response, or choose a model with a more suitable response.
Q57: What should you do if the accuracy is inaccurate?
A: Confirm whether you calibrated the MFC with the actual gas, whether it operates within the effective range, and whether the pressure differential and temperature remain stable. If necessary, recalibrate it.
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