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EDC-300 Series Mass Flow Controller and Meters

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EDC-310 Massflow Controller and Meters
Full Scale Flow Range: 3sccm-10sccm
Maximum Pressure Rating: 1500 Psi / 100 Bar

EDC-315 Massflow Controller and Meters
Full Scale Flow Range: 3sccm-10sccm
Maximum Pressure Rating: 1500 Psi / 100 Bar

EDC-320 Massflow Controller and Metes
Full Scale Flow Range: 10sccm-30slm
Maximum Pressure Rating: 1500 Psi / 100 Bar

EDC-325 Massflow Controller and Metes
Full Scale Flow Range: 10sccm-30slm
Maximum Pressure Rating: 1500 Psi / 100 Bar

EDC-330 Massflow Controller and Metes
Full Scale Flow Range: 30slm-100slm
Maximum Pressure Rating: 1500 Psi / 100 Bar

EDC-335 Massflow Controller and Meters
Full Scale Flow Range: 30slm-100slm
Maximum Pressure Rating: 1500 Psi / 100 Bar

EDC-340 Massflow Controller and Metes
Full Scale Flow Range: 100slm-200slm
Maximum Pressure Rating: 500 Psi / 30 Bar

EDC-345 Massflow Controller and Meters
Full Scale Flow Range: 100slm-200slm
Maximum Pressure Rating: 500 Psi / 30 Bar

EDC-350 Massflow Controller and Meters
Full Scale Flow Range: 200slm-400slm
Maximum Pressure Rating: 500 Psi / 30 Bar

EDC-355 Massflow Controller and Meters
Full Scale Flow Range: 200slm-400slm
Maximum Pressure Rating: 500 Psi / 30 Bar

EDC-360 Massflow Controller and Meters
Full Scale Flow Range: 400slm-1000slm
Maximum Pressure Rating: 500 Psi / 30 Bar

EDC-365 Massflow Controller and Meters
Full Scale Flow Range: 400slm-1000slm
Maximum Pressure Rating: 500 Psi / 30 Bar

EDC-500 Series Massflow Controller and Meters

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EDC-510A/B Massflow Controller and Meters
Full Scale Flow Range: 3sccm-10sccm
Maximum Pressure Rating: 500Psi / 30Bar

EDC-520A/B Massflow Controller and Meters
Full Scale Flow Range: 10sccm-30slm
Maximum Pressure Rating: 500Psi / 30Bar

FAC-300 Analog Series Mass flow Controller and Meters

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FAC 320 Analog Series Mass flow Controller and Meters
Full Scale Flow Range: 10sccm-30slm
Maximum Pressure Rating: 500Psi / 30Bar

FDC-300 Series Mass Flow Controller and Meters

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FDC-320 Series Mass Flow Controller and Meters
Full Scale Flow Range: 10sccm-30slm
Repeatability: ±0.2% F.S

FDC-330 Series Mass Flow Controller and Meters
Full Scale Flow Range: 30slm-100slm
Repeatability: ±0.2% F.S

FDC-340 Series Mass Flow Controller and Meters
Full Scale Flow Range: 100slm-200slm
Repeatability: ±0.2% F.S

FDC-350 Series Mass Flow Controller and Meters
Full Scale Flow Range: 200slm-400slm
Repeatability: ±0.2% F.S

FDC-360 Series Mass Flow Controller and Meters
Full Scale Flow Range: 400slm-1000slm
Repeatability: ±0.2% F.S